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Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze. by
Edition: Wiley international ed.
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: New York : Wiley, c2004
Availability: Items available for loan: College of Agriculture & Natural Sciences Library (1)Call number: TK 7871.85.M45. Physics Department Library (1)Call number: TK7871.85.M36.

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